Sejin Jung
(Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Republic of Korea)
To improve the electrical properties of carbon nanowalls(CNW), conductive oxide films such as indium tin oxide(ITO), aluminium-doped zinc oxide(AZO), zinc oxide(ZnO) and gallium doped zinc oxide(GZO) were deposited on the surface of carbon nanowalls. CNW were grown directly on silicon wafers using microwave plasma-enhanced chemical vapor depostion(MPECVD). Conductive oxide films were deposited by rf magnetron sputter on the carbon nanowalls. The images of carbon nanowalls deposited with oxide films were identified by field emission scanning electron microscope(FE-SEM), and the components of the specimen were analyzed using an energy dispersive spectrometer(EDS). The Structural properties of the specimen were analyzed using a Raman spectrometer. The crystals were analyzed using x-ray diffraction spectroscopy(XRD). Electrical properties were analyzed using Hall measurements and 4-point probe.
Sejin Jung
(Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Republic of Korea)
Prof.
Wonseok Choi*
(Department of Electrical Engineering, Hanbat National University)
Mr
Seung-Cheol Yoo
(Department of Electrical Engineering, Hanbat National University)
Mr
Sangjoon Lee
(Department of Electrical Engineering, Hanbat National University)
Ms
So Yeon Lee
(Department of Electrical Engineering, Hanbat National University)
Prof.
Hyunil Kang
(Department of Electrical Engineering, Hanbat National University)
Prof.
Jung Hyun Kim
(Department of Advanced Materials Science and Engineering, Hanbat National University)
Ms
Jae Hyeon Jeon
(Department of Industrial and Management Engineering, Hanbat National University)
Mr
Dong-Gun Lim
(Department of Electronic Engineering, Transportation National University)
Mr
Hyun Suk Hwang
(Department of Electric Engineering, Seoil University)
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